Computer simulation of the bombardment of a copper film on graphene with argon clusters

Chin. Phys. B Vol. 24, No. 2 (2015) 020701

A. Y. Galashev and O.R. Rakhmanova

The process of graphene cleaning of a copper film by bombarding it with Ar₁₃ clusters is investigated by the molecular dynamics method. The kinetic energies of the clusters are 5, 10, 20, and 30 eV and the incident angles are θ = 90°, 75°, 60°, 45°, and 0°. It is obtained that the cluster energy should be in the interval 20 eV–30 eV for effective graphene cleaning. There is no cleaning effect at vertical incidence (θ =0°) of Ar₁₃ clusters. The bombardments at 45° and 90°incident angles are the most effective on a moderate and large amount of deposited copper, respectively.

/2015/Chin_Phys_24_2_2015.pdf