Computer study of the removal of Cu from the graphene surface using Ar clusters

Computational Materials Science 98 (2015) 123–128

Alexander Y. Galashev

Abstract - The method of molecular dynamics has been used to study the bombardment of a copper film onsupported graphene by Ar₁₃ clusters with kinetic energies of 5, 10, 20 and 30 eV and different anglesof incidence. It is obtained that the cluster energy should be in the interval 20–30 eV for effective graphenecleaning. There is no cleaning effect at vertical incidence (θ =0°) of Ar₁₃ clusters. The bombardmentsat 45° and 90° incident angles are the most effective ones at a moderate and big amount of depositedcopper respectively.

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